Protoflex Corporation Received Order From Chinese Sunrui Group

Published on 15 Feb 2013
ProtoFlex 
Protoflex Corporation is proud to announce a new order received from the Sunrui Group, China, for a PECVD system.  Based on the FLEX 1100, it’s designed for depositing Diamond-Like Coating (DLC) films over an 8” wafer and includes wafer rotation at 800⁰C. Currently, they are fabricating systems for the University of Cairo’s Egyptian Nanotechnology Center and for Bharat Heavy Electricals in India.  These orders include a Sputtering system (six magnetrons with in situ tilting and wafer temperature of 800⁰C), a Thermal Evaporation system (six thermal sources and wafer temperature of 800⁰C) based on the FLEX 2200 model and a Quantum Efficiency Measurement System, QEUNIS.

 
Source: Protoflex Corporation
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ProtoFlex (Production Equipment): https://www.enfsolar.com/directory/equipment/78
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